Standard configuration for Josephson junction manufacture equipment , One chamber for Ion milling(LL), a chamber for E-beam evaporation, a chamber for Oxidation.
Fully automatic transfer and process control by Software. All chambers include UHV compatible baking lamp for system bake out, sample degassing.
Fully automatic transfer and process control by Software. All chambers include UHV compatible baking lamp for system bake out, sample degassing.
