Adnanotek Corporation


AdNaNoTek Corporation is the rising leader in ultrahigh vacuum (UHV) technologies and solutions provider in the world.

We specialize in the design and manufacture of state-of-the-art and fully customizable UHV systems which fits any research and industrial needs.

Our range of products and services includes:

UHV Deposition Systems:
  • Pulsed Laser Deposition (PLD)
  • Pulsed-Laser Molecular Beam Epitaxy (PLMBE)
  • Molecular Beam Epitaxy (MBE)
  • Magnetron Sputtering Deposition (Sputter)
  • Electron Beam Evaporator (E-Beam)
  • Ion Beam Sputter Deposition (IBSD)
  • Atomic Layer Deposition Systems (ALD)
  • Reactive Ion Etching (RIE)
  • Chemical Vapor Deposition (CVD)
  • Customized UHV Systems, and Integrated UHV Systems
UHV Components:
  • UHV Linear Tunnel System
  • Sample/Target Exchanger
  • Planetary Substrate Manipulator
  • Customized UHV/HV Chamber
  • Ion Sources
  • Sputter Cathodes
  • SiC Heating System
  • Electron Beam Heating Systems, and Laser Heating System
Ething Systems:
  • RIE Systems
  • ICP RIE Systems
  • ECR RIE Systems
  • Ion Beam Etching Systems
Our UHV deposition systems are guaranteed to deposit extremely high quality thin films in terms.
The state-of-the art system control software provides user-friendly interface that allows easy operation, precise parameter tuning, real-time process monitoring, and complete data logging.

In addition, we also excel in providing high quality costumer and technical services, which ranges from in-depth theoretical and hands-on training, professional technology consultation, to technical support.
With our vast knowledge in nanotechnology, surface science, semiconductor, and thin-layer coating;
extensive experience in UHV deposition technology; and consistent interaction with our customers,

We are sure to:
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