What Is Ald And Peald? UHV Plasma Enhanced Atomic Layer Deposition (PEALD) Introductory Principle： Plasma Enhanced Atomic Layer Deposition (PEALD) is a deposition technique used for producing high quality epitaxial (atomic layer) thin film. PEALD use chemical precursors in which each precursors are carefully selected and introduced in specific order. During the deposition process, the …
What Is Ibsd And Ibe? UHV Ion-Beam Sputter Deposition (IBSD) Introductory Principle： Ion-Beam Sputter Deposition (IBSD) is a thin-layer deposition method in which the mechanism of ion production is separate from the target. The ion source generate ions from a hot filament by collisions with electrons that are confined by a magnetic field. The ions …
What Is Pulsed Laser Deposition? UHV Pulsed Laser Deposition – Laser MBE (PLD) Introductory Principle： In Pulsed-Laser Deposition (PLD) or Laser MBE, high power pulsed laser beam is focused on the surface of the target. When the laser pulse is absorbed by the target, energy is converted to electronic excitation and then into thermal, chemical …
What Is Sputter? UHV Magnetron Sputtering System (MDS) Introductory Principle： In Magnetron Sputtering Deposition (MDS) the coating/target material are placed on a magnetron cathode. The chamber is evacuated at ultrahigh vacuum (UHV) condition to reduce impurities and to ensure pure coating process. Then the chamber is back-filled with the process gas (usually Ar). Electric potential …
What Is E-beam Evaporator Technology ? UHV Electron Beam Evaporator (EBE) Introductory Principle： In Electron Beam Evaporator (EBE), high-energy electron beam is generated from tungsten filament, while electric and magnetic field direct these electrons towards the target material to heat up the surface of the target. Electron beam position can be confirmed visually to ensure …
What is MBE Technology ? UHV Molecular Beam Epitaxy (MBE) Introductory Principle： Molecular Beam Epitaxy (MBE) is an ultrahigh vacuum (UHV) deposition technique used for producing high quality epitaxial (atomic layer) thin film with precise control on thickness, composition and morphology. This allows Laser MBE technique to produce much higher thin layer quality compared to …