UHV Design & Components
ICP etching is based on RIE with the addition of inductively coupled plasma,
and the resulting high-density plasma is surrounded by coils, which will act as secondary coils in the transformer,
accelerating electrons and ions, causing collisions to generate more ions and electrons.
and the resulting high-density plasma is surrounded by coils, which will act as secondary coils in the transformer,
accelerating electrons and ions, causing collisions to generate more ions and electrons.
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Substrate Manipulator
UHV Design & Components

Chambers
UHV Design & Components

Customize Weldments
UHV Design & Components

Isolation Gate Valves
UHV Design & Components

Shielding Gate Valves
UHV Design & Components

Manipulators
UHV Design & Components

Transfer Arms
UHV Design & Components
AdNaNo-Tek is famous as UHV systems provider, we are also proud to present our new product line.
We are UHV system maker, we know the components.
AdNaNo-Tek Vacuum Products Division is expert to provide best quality of components: Gate Valves, Chambers and Motion Manipulators.
As long-time experience of system building, we know how to make the components in better performance and give better solution to customers.
We know how to control the clean processing during the component’s fabrication and make better design for mechanism motions.
We are UHV system maker, we know the components.
AdNaNo-Tek Vacuum Products Division is expert to provide best quality of components: Gate Valves, Chambers and Motion Manipulators.
As long-time experience of system building, we know how to make the components in better performance and give better solution to customers.
We know how to control the clean processing during the component’s fabrication and make better design for mechanism motions.
- Chambers and Customize Weldments
- Gate Valves
- Manipulators
- Transfer Arms