Thermal Evaporator System Categories Menu Deposition System Thermo Evaporator E-Beam Evaporator Quantum Computing Deposition System Magnetron Sputtering Systems Molecular Beam Epitaxy (MBE) Pulsed Laser Deposition (PLD) Ion-Beam Sputter Deposition _IBSD Linear and cluster system Plasma System Reactive-Ion Etching ( RIE ) Inductively Coupled Plasma ( ICP ) Electron Cyclotron Resonance ( ECR ) Ion Beam Etching UHV System & Components Laser Heating Water Cooling or LN2 Cooling Manipulator 4 inch Manipulator 2 thickness crystal feedback E-8 torr 4 thermo boat In Evaporation In On Silicon 10um Low Temperature Thermo Evaporator Load lock auto transfer Computer control$$\rightarrow$$ 2 inch Substrate$$\rightarrow$$ Two Thermo boat with pneumatic shutter$$\rightarrow$$ Z axis 10cm movement$$\rightarrow$$ LN2 cold finger trap$$\rightarrow$$ E-beam Super Industrial Usage Easy operation and low maintenance.$$\rightarrow$$ Up to 6 inch Wafer$$\rightarrow$$ Pfeiffer Hipace 700 Base pressure: E-8 torr$$\rightarrow$$ 5 min loading wafer$$\rightarrow$$
