Electron Cyclotron Resonance(ECR)


Microwave ECR Plasma Generator

Electron Cyclotron Resonance(ECR)

ECR is a kind of microwave plasma equipment, which uses microwaves to excite gas molecules to dissociate them to form plasma, but a magnetic field is added to the cavity, and an electric field perpendicular to the axial magnetic field is generated, so that the electrons move in a circular motion around the magnetic field.

When the angular frequency of electron movement is the same as the frequency of change of the wave vector of the microwave, the electron cyclotron resonance is achieved.

At this time, the electron can absorb the microwave energy most effectively, which greatly increases the dissociation efficiency.



Scroll to Top