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Manipulators

Categories: UHV Design & Components

 

Product's Features

Features:

Product's Specification

UHV Manipulator Series Specification
Flange Material
SUS304
Body Material
AL6061 with anodized
Feedthrough Material
Welded Bellows in AM350
Leak rate
1x10-10 mbar l/s, He
Vacuum Rate
1x10-10 mbar
Temperature Range
-20ºC to 230ºC

Product's Information

Operation Normial OD Flange type and sizes Part number
Motorized-XYZ stage
4"
DN100CF
MZ3-CF100
Motorized-XYZ stage
6"
DN160CF
MZ3-CF160
Manual-XYZ stage
4"
DN100CF
MM3-CF100
Manual-XYZ stage
6"
DN160CF
MM3-CF100
Motorized-Z stage
1-1/2"
DN40CF
MZ1-CF40
Manual-Z stage
3/4"
DN16CF
MM1-CF16
Manual-Z stage
1-1/2"
DN40CF
MM1-CF40
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