What Is Sputter?

What Is Sputter? UHV Magnetron Sputtering System (MDS) Introductory Principle: In Magnetron Sputtering Deposition (MDS) the coating/target material are placed on a magnetron cathode. The chamber is evacuated at ultrahigh vacuum (UHV) condition to reduce impurities and to ensure pure coating process. Then the chamber is back-filled with the process gas (usually Ar). Electric potential […]

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