Ｗhat Is Sputter?
What Is Sputter? UHV Magnetron Sputtering System (MDS) Introductory Principle： In Magnetron Sputtering Deposition (MDS) the coating/target material are placed on a magnetron cathode. The chamber is evacuated at ultrahigh vacuum (UHV) condition to reduce impurities and to ensure pure coating process. Then the chamber is back-filled with the process gas (usually Ar). Electric potential […]