Include
- 18-in Spherical SS316L electro-polished Chamber
- < 5E-10 Torr Base Pressure
- UHV pumps and gauges
- 10x10mm substrate size(up to 2 inch)
- 5-axes sample manipulator (XYZ, Rotation, and Tilt)
- Laser Heating Element with sample heating temperature: 1200°C (in < E-3 torr) and 1000°C (in > E-3 torr) compatible to oxygen-rich and any atmospheric conditions
- Planetary target manipulator with 8 * 1"(or 4*2") target holders
- Laser viewport with "smart defender"
- Sample and target in-vacuum transfer
- FBBear System Control Software
Options
- High pressure RHEED system (real-time epitaxy monitoring)
- Excimer laser with optical path
- Mask system with z-motion
- Pressure control system: upstream and downstream
- Wedge function and multi mask allow you one deposition get different thin films
Features
- Base pressure : 1E-9 torr
- RHEED system
- 4 axis substrate manipulator with rotation and XYZ movement
- Pumping throughput control
- All metal leak valve
- Laser Heater
Include
- Target Manipulator
- 4 X holder in 2 inch
- 8 X holders for 1 inch
- UHV Exchange target
- Up/Down position up to 10cm
- 360 degree Non stop Rotation Revolution Sweeping
