PLD - 12L
Include
- 12-in Spherical SS316L electro-polished Chamber
- < 5E-10 Torr Base Pressure
- Hipace700 Turbor Pump and Vacuum Gauges
- 10x10mm substrate size
- 5-axes sample manipulator (XYZ, Rotation, and Tilt)
- Laser Heating Element with sample heating temperature: 1200°C (in < E-3 torr) and 1000°C (in > E-3 torr) compatible to oxygen-rich and any atmospheric conditions
- Planetary target manipulator with 6 * 1"(or 3*2") target holders,
- Target Z stage movement
- Laser viewport with "smart defender"
- Sample and target in-vacuum transfer
- FBBear System Control Software
Options
- High pressure RHEED system (real-time epitaxy monitoring)
- Excimer laser with optical path
- Mask system with z-motion
- Pressure control system: upstream and downstream
- Wedge function and multi mask allow you one deposition get different thin films
Feature
- Base pressure : 5E-10 torr
- RHEED system
- 4 axis substrate manipulator with rotation and XYZ movement
- Pumping throughput control
- All metal leak valve
- Laser or SiC Hea
