Product's Features
Features:
- Up to 4" (100mm) Z travel
- 1/2" (12.5mm) X,Y travel
- UHV compatible
- Manual & Motorize options
Product's Specification
Product's Information
| Operation | Normial OD | Flange type and sizes | Part number |
|---|---|---|---|
|
Motorized-XYZ stage |
4″
|
DN100CF |
MZ3-CF100 |
|
Motorized-XYZ stage |
6″
|
DN160CF
|
MZ3-CF160
|
|
Manual-XYZ stage |
4″
|
DN100CF
|
MM3-CF100 |
|
Manual-XYZ stage
|
6″
|
DN160CF
|
MM3-CF100
|
|
Motorized-Z stage
|
1-1/2″
|
DN40CF
|
MZ1-CF40
|
|
Manual-Z stage
|
3/4″
|
DN16CF
|
MM1-CF16
|
|
Manual-Z stage
|
1-1/2″
|
DN40CF
|
MM1-CF40 |