IBSD - 16 Inquiry Categories: Ion-Beam Sputter Deposition Categories Menu Deposition System Thermo Evaporator E-Beam Evaporator Quantum Computing Deposition System Magnetron Sputtering Systems Molecular Beam Epitaxy (MBE) Pulsed Laser Deposition (PLD) Ion-Beam Sputter Deposition _IBSD Linear and cluster system Plasma System Reactive-Ion Etching ( RIE ) Inductively Coupled Plasma ( ICP ) Electron Cyclotron Resonance ( ECR ) Ion Beam Etching Uhv Design & Components Laser Heating IBSD - 16 Include Base pressure: 5E-7 torr Thickness Monitor Gridded Ion source(IBSD) Endhall Ion source(IBAD) Water cooling target for IBSD Dual Mask Down stream control Upstream control 4 Sputter cathodes 2 inch Laser Heater
