Include
- Wafer size – up to 8 in
- Base pressure 10-8 torr
- Manipulator could be tilted during rotation by ±75 degrees
- Two E-Beam guns with 3 pockets capacity each
- Ion beam assisted deposition (opt.)
- Dedicated FBBEAR software integrates an easy access to growth parameters, recipe editing, data logging and substrate transfer control
Feature
- Base pressure : 5E-7 torr
- Planetary manipulator
- Dual E-gun
- Fully automatic process via software control
E-beam coating Chrome
