JEB-2 is a vertical version JEB system for Special application, it has an E-beam source in bottom chamber, Load lock function, Oxidation and milling process is in the top chamber.
JEB-2E
Include
Ion Milling chamber
UHV E-beam evaporator
Full Automatic transfer
Ion Milling + E-beam Evaporator
JEB-2 CRYO
Include
Ion Milling chamber
UHV E-beam evaporator
LN2 cooling manipulator
Full Automatic transfer
Starting deposition for 100nm, wait process cooling down,transfer back to load lock for back room temperature and finish the whole process.
