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JEB-4

JEB-4 is a 4 chamber system, a stand alone Load Lock, ion beam chamber, E-beam chamber deposit high quality thin film.

All chambers include UHV compatible baking lamp for system bake out, sample degassing.

JEB-4 MBE

This Type JEB-4 is capible to use Effusion cell as MBE evaporation and E-beam both.
With Laser heating and SiC heater
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